[1] High Etching Rate
Performing excellent etching activity due to superior characteristic of ION in use of specific diffuser.
[2] Easy operation
The operation is very easy and reliable operating with the touch panel

[1] Optical Disc
SiO2 Etching, Cleaning Stamper, Pit processing, Grooving.
[2] Electric Board
Etching Insulation Layer, Etching Au surface.
[3] Electric Parts
Various etching

Our RIE has been used as a standard device in various research laboratories and the educating organizations.